High-speed Perc Laser Equipment-Maxwell Technologies-High-end Equipment Manufacturer in the Pan-semiconductor Field

Automatic loading and unloading system, dust removal system, laser system, optical path transmission system, automatic positioning camera and software, high-speed galvanometer scanning system, man-machine interface system and program, processing graphic editing and processing system, and discharge light spot extraction and detection system.

Equipment Advantages

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Adopt high-speed DD four-station interactive work to ensure high productivity
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High-speed galvanometer scanning, the galvanometer scanning speed is ≥60m/s, and the digital control mode is adopted to greatly improve the laser marking efficiency
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Support multi-layer design, double layers can optimize different parameters
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High power green laser with wavelength of 532nm, maximum power ≥55W and power stability ≤2%RMS
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Dual-track independent control to ensure maximum production capacity
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Equipment Picture

Basic Parameters

1. Equipment Size : 5500mm x 2730mm x 2260mm
2. Wafer Size : 156mm x 156mm ~ 230mm x 230mm , Thickness:140~220μm
3. Double-line Productivity : M10≥8500PCS/H ; M12 ≥7200PCS/H(Compatible with 230 sources at the same time)
4. Breakage Rate ≤ 0.05%(Except for incoming cracks)
5. Uptime ≥ 98%
6. Laser Wavelength : 532nm
7. Laser Frequency ＜ 2000Khz
8. Laser Power : 30w~55W
9. Power Stability ＜ 2% RMS
10. Laser Lifetime ≥ 50000小時
11. Scan Mode : Galvanometer scanning
12. Spot Size : 35um±5um(Adjustable in size)
13. Scanning Speed ≥ 35m/s
14. Graphic Marking Accuracy ≤ ±15μm
15. Loading Breakage Detection : 12 million pixels (general),Edge collapse and corner missing can be detected
16. Graphics Compatibility : Compatible with plt, dxf, dwg graphics formats(Compatible with points, lines and segments)
17. Dust Removal and Filtration Efficiency : Dust removal ≥95%, filtration ≥99%,(Independent dust removal equipment, exhaust air volume max2000m3/h)
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